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Electronic information

8-inch wafer microscope detection system was born in Beijing

In Electronic Infomation Category: R | on April   27, 2011

Few days ago, 8-inch wafer inspection microscope system developed by 6 months in Beijing Daxing Industrial Base Automation Technology Research Institute was born, this is the second air-type silicon wafer loader machinery hand and AD9852AST datasheet and then after a new type of robot. The technology is completely automated homes by the independent research and AD9852AST price and development, self-production. The system consists of transmission devices, macro and AD9852AST suppliers and microscopic magnification device inspection device composed of the internal system is controlled by the third generation of software.

8-inch wafer robotic microscopy system, through the wafer from the film box tray out on the vacuum suction, or operating the mouse buttons by changing the wafers shift to a preliminary examination. Microscopy platform for precision testing, the wafer can be observed micro-particles, scratches, pollution and so on. The robot uses vacuum suction linear structure, flexible and reliable platform to provide 40-1000 times the microscopic observation of effects. It also offers a variety of flexible wafer inspection mode, the contents of the following test: wafer ID, wafer notch direction and speed of wafer rotation, wafer micro-lattice, etc., and continuous monitoring can be achieved .

In the entire development process, mechanical design, software design, circuit design, all gas path design was further improved and optimized. In the software part of them, to achieve a modular and standardized applications, power failure or improper operation of the equipment such as equipment failure occurs, the commissioning can restore it in the shortest time. In the 3rd generation version of the software, the improvement of the human-computer interaction interface, enables the operator interface in a friendly easy to use, interactive and convenient, but also to ensure the security and stability of equipment operation. Mainly in the design of electronic circuits control the motor and sensor signals back to the board, so the information can either accept the feedback loop formed. One danger in the position to set the robot sensors, in order to avoid collisions and dangerous actions it happens.